Abstract
Heterogeneous monolithic 3D integration for hybrid vertical CMOS inverter using n-type IGTO TFT on p-type Si FET
Published Version
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https://doi.org/10.1016/j.mssp.2024.108871
Copy DOIPublication Date: Sep 10, 2024 | |
Citations: 2 |
Heterogeneous monolithic 3D integration for hybrid vertical CMOS inverter using n-type IGTO TFT on p-type Si FET
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