Abstract

This paper reports transmitting performance simulation of the circular piezoelectric transducer using finite element analysis (FEA) approach. The 3D model of the transducer is designed and simulated using six different piezoelectric materials. FEA simulation and modelling had been carried out using the COMSOL Multiphysics 5.0 software. The thickness and radius of the piezoelectric material layer were varied and transmitting performance were compared and analysed. From this simulation, the transmitting performance of the Piezoelectric Micro Ultrasonic Transducer (PMUT) is decreased as the membrane radius increased, while it increased as the thickness of the piezoelectric material layer increased. The total device thickness at 430 µm with the membrane radius at 1500 µm, show the best performance at 240 kHz of frequency, tailored for many underwater applications. The thickness and radius have contributed significantly to the mechanical stress generated at the surface of the piezoelectric material layer, in contact with the electrode. Hence, the device radius and thickness of the piezoelectric layer are considered, regardless of the type of piezoelectric material used.

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