Abstract

A transmission X-ray microscope having two zone plates has been developed at BL-12, Ritsumeikan Synchrotron Radiation Center (Rits SR Center). By incorporating a new type of condenser zone plate (diameter 9 mm, zone number 41,890, outermost zone width 53.7 nm) in the microscope, 50 nm resolution has been obtained from both knife edge test and star test pattern at a wavelength of 3.2 nm, and for diatoms, the 0.1 µm inner structures have been clearly resolved.

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