Soft X-Ray Microscopy with Zone Plates at UVSOR

N Watanabe,Y Shimanuki,M Taniguchi,K Kawasaki,H Kihara,Y Watanabe,Y Nagai

doi:10.1007/978-3-540-46887-5_33

Soft X-Ray Microscopy with Zone Plates at UVSOR

N Watanabe, Y Shimanuki + Show 5 more

https://doi.org/10.1007/978-3-540-46887-5_33

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Publication Date: Jan 1, 1992

Affiliation: Nagoya University, Tsurumi University, Jichi Medical University, Canon (Japan), Azabu University

#Zone Plates #Outermost Zone Width + Show 8 more

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Abstract

An imaging X-ray microscope was assembled with two zone plates at UVSOR. For both the condenser zone plate (CZP) and the objective zone plate (MZP), the same sized zone plates were used: diameter — 0.5 mm; outermost zone width — 0.5 μm; central mask — 95 μm; number of zones, n — 250; supported with 0.3 μm polyimide film. With these zone plates, a mesh (Cu #1000) and a zone plate were observed. The spatial resolution was estimated as 1.5 μm.

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