Abstract
Candidate deep-UV pellicle materials were tested for transmission stability under deep-UV exposure. Measurements were made with an exposure apparatus using a KrF excimer laser and a light pipe illuminator. Increased absorption and thickness reduction caused by deep-UV exposure were found in polyvinyl butyral (PVB)-based pellicles. The thickness of the PVB pellicles was monitored in situ, and a dark reaction was found to occur long after the deep-UV exposure is complete. Pellicles made with a second, fluoropolymer material were also tested and found to be stable up to exposures of 10000 J/cm/sup 2/.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
