Abstract
This paper presents the quantification of gas breakdown voltages in low-pressure argon capacitive radio frequency (rf) discharges in the presence of an external transverse magnetic field via fully kinetic particle-in-cell/Monte Carlo collision simulations. It is found that as the magnetic field increases, the left branch of the breakdown curve, a double-valued rf breakdown voltage regime, shifts toward a lower-pressure region. A split of the breakdown curve into lower and upper branches occurs when the external magnetic field rises to a critical value. The observed abrupt transition of rf breakdown behaviors can be understood based on the electron kinetics behaviors, with the consideration of the enhanced ionization and electron confinement induced by drift motions. An improved analytical model is developed, which can estimate the critical magnetic field required for the occurrence of the transition.
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