Abstract
Abstract We propose a hollow plasma absorption probe (PAP) designed to improve the accuracy of electron density measurement in low-pressure plasmas regardless of the sheath thickness on the planar probe surface. This improvement is achieved through an artificial hollow space acting as a thick sheath to bring the resonant absorption frequency (f_PAP) from the hollow PAP close to the surface wave resonant frequency (f_SWR), insensitive to variation in sheath thickness. Electromagnetic simulations confirmed the efficiency of the hollow design, showing a minimized discrepancy between f_PAP and f_SWR even with the thin sheath. Optimal configurations with a coaxial core diameter of 5 mm and a hollow depth of 5 mm were found and tested in plasmas ranging from 〖5×10〗^8 cm^(-3) to 〖5×10〗^10 cm^(-3). Comparative experiments employing a planar cutoff probe to directly measure f_pe demonstrated good agreement between the electron density derived from the hollow PAP and from the planar cutoff probe, compared to that from a conventional planar PAP.
Published Version
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