Transient Temperature Measurement in Nanosecond Pulsed Laser Micro Drilling by Using Micro Thin Film Thermocouples

Abstract

It is of fundamental interest to investigate the complicated and transient thermal phenomena near the nanosecond pulsed laser-material interaction region. While numerous analytic and numerical models have been developed, little experimental results are available for a solid understanding of transient thermal phenomena in nanosecond pulsed laser micro drilling. In this paper, micro thin film thermocouples were fabricated on electroplated nickel substrates to study the transient temperature variations during laser micro drilling. Transient temperatures were successfully measured with superior temporal and spatial resolutions for the fundamental study of the nanosecond pulsed laser micro drilling. The in-situ measured data can be used to improve existing analytical and numerical models.