Abstract
The transient characteristics of x-axis inversion for AT-cut quartz plates were studied. The resonance frequency of the quartz plate was monitored throughout the thermal treatment process for x-axis inversion. The x-axis inversion can be detected by resonance frequency change. It was observed that the critical temperature, T c, for the x-axis inversion decreases with the film thickness deposited on the quartz plate. An expansion phenomenon of the x-axis inverted area was observed at temperatures higher than T c. Degeneration of resonance frequencies corresponding to AT-cut and -35°15′ rotated Y-cut was observed above 553° C.
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