Abstract

The laser induced breakdown threshold of HfO2 films is studied with single pairs of pulses of variable delay and 50 fs and 1 ps pulse duration. Two distinct transient regimes are observed that can be related to the relaxation of the electron density from the conduction band via an intermediate state to the valence band. The experimental results are in good agreement with a theoretical model that assumes occupation of mid gap states after the first pulse on a time scale of several tens of picoseconds and subsequent decay of this population via recombination with holes in the valence band on a time scale of several tens of milliseconds.

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