Transient Hydride Generation during III-V Semiconductor Processing

Abstract

Abstract Compound semiconductors—semiconductors made when elements from Columns III and V of the Periodic Table are combined—are being used more frequently in the fabrication of integrated circuits. The evaluation and utilization of new processing technologies have enabled compound semiconductor technology to move out of the laboratory into real-world applications. Compound semiconductors, such as gallium arsenide and indium phosphide, are being used because of their inherent radiation hardness and their ability to quickly transmit electrons and because they can be utilized to make semiconductor lasers and photodetectors used in telecommunications. Although the raw chemical constituents used to make and process compound semiconductors have well-documented toxicological effects, compound semiconductor materials per se were not thought to present an acute toxicity hazard. This investigation documented the formation of arsine and phosphine—acutely toxic gaseous hydrides—which result from the handling and pro...