Abstract
3-dimensional (3D) structures composed of flexible and soft materials have been in demand for bio-integrated devices. However, the fabrication of 3D structures using micro electro mechanical systems (MEMS) techniques has limitations in terms of commonly used inorganic materials and the microscale of resulted structures. Here, we developed a novel technique to selectively bond polydimethylsiloxane (PDMS) and parylene C by plasma treatment, with which 2D structures fabricated using conventional MEMS techniques are transformed into 3D structures by the inflation of selectively non-bonded patterns. We demonstrated various soft and flexible 3D devices with embedded electrical functions for biomedical applications.
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