Traceable atomic force microscope based on monochromatic light interference

Abstract

Atomic force microscope (AFM) is widely applied to the measurement of the micro-nano structures due to its three-dimensional spatial resolution of sub-nanometer. However, the height measurement traceability in the z-axis is complex to be implemented in conventional AFMs. In this paper, a traceable AFM is developed based on the monochromatic light interference (MLI) principle without probe calibration. The height change of the AFM's probe is directly detected by extracting the phase change of the MLI fringes on the probe tip with the Hilbert transform based phase extraction algorithm, and the three-dimensional surface topography is reconstructed with a surface recovery algorithm. The configuration of tracing to the wavelength of the monochromatic light in real-time further improves the measurement accuracy of the MLI-AFM. A prototype MLI-AFM is established to demonstrate its measurement accuracy enhancement.