Abstract
In this paper, we present the results of our work on the development and characterization of nano-structured Zinc Oxide (ZnO) thin films successfully grown via a simple SILAR process. The deposition is carried out on a ceramic micro-sensor at room temperature. The deposited film was annealed at 400 °C for 1 h in an oxygen atmosphere.X-ray diffraction (XRD) and scanning electron microscopy (SEM) characterizations show that the film completely covers the substrate and exhibits a hexagonal Wurtzite structure. The effect of the film growth conditions on the film morphology and structure was assessed. The bandgap values of the different films grown on glass substrates were also studied by means of UV–Vis spectroscopy, and it was found that the bandgap value varies from 3.2 to 3.8 eV depending on the growth conditions. The sensor response behavior against ethanol vapor was investigated under thermo-activation at 300 °C.
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