Abstract
AbstractTo investigate the feasibility of a 3D integrated all-solid-state micro-battery, the deposition of several battery materials was investigated. Deposition techniques where used that are in principle able to deposit step conformally in 3D structures: ALD was used to create a conductive Pt current collector, and LPCVD was applied for the deposition of poly-silicon anodes and LiCoO2 cathodes. The layers, initially deposited on planar substrates, showed the expected physical and electrochemical behavior and are in principle suitable for solid state micro-batteries.
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