Abstract

Silicon-based tracking detectors have been used in several important applications, such as in cancer therapy using particle beams, and for the discovery of new elementary particles at the Large Hadron Collider at CERN. III-V semiconductor materials are an attractive alternative to silicon for this application, as they have some superior physical properties. They could meet the demands for fast timing detectors allowing time-of-flight measurements with ps resolution while being radiation tolerant and cost-efficient. As a material with a larger density, higher atomic number Z and much higher electron mobility than silicon, GaAs exhibits faster signal collection and a larger signal per μm of sensor thickness. In this work, we report on the fabrication of n-in-n GaAs thin-film devices intended to serve next-generation high-energy particle tracking detectors. Molecular beam epitaxy (MBE) was used to grow high-quality GaAs films with doping levels sufficiently low to achieve full depletion for detectors with an active thickness of 10 μm. The signal collection speed of the detector structures was assessed using the transient current technique (TCT). To elucidate the structural properties of the detector, Kelvin probe force microscopy (KPFM) was used, which confirmed the formation of the junction in the detector and revealed residual doping in the intrinsic layer. Our results suggest that GaAs thin films are suitable candidates to achieve thin and radiation-tolerant tracking detectors.

Highlights

  • The aim of this work was to produce and investigate a GaAs n-in-n/n-in-p thin-film tracking detector as a potential candidate for the ATLAS ITk pixel detector upgrade, which is currently scheduled to be installed by 2026, replacing the commonly used Si tracking detectors

  • Using a Kelvin probe force microscope (KPFM), a sufficiently low effective doping (Neff) level was found for the nominally intrinsic layer, and low leakage currents were observed with current densityvoltage (JV) measurements

  • N-in-n thin-film detectors were processed from molecular beam epitaxy (MBE)-grown epitaxial GaAs thin films

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Summary

Introduction

The aim of this work was to produce and investigate a GaAs n-in-n/n-in-p thin-film tracking detector as a potential candidate for the ATLAS ITk pixel detector upgrade, which is currently scheduled to be installed by 2026, replacing the commonly used Si tracking detectors. Using a Kelvin probe force microscope (KPFM), a sufficiently low effective doping (Neff) level was found for the nominally intrinsic layer, and low leakage currents were observed with current densityvoltage (JV) measurements The performance of these particle detectors was examined using nanosecond laser pulses (Transient Current Technique, TCT) to mimic the incidence of highenergy particles passing through the detector. This article is divided into the following sections The substrate temperature was subsequently lowered to Tsubs = 620 °C, and the following growth procedure was executed: first, a 1 μm p++ GaAs buffer layer (Be-doped) was grown on the (p++) substrate, with a doping level of 1018 cm-3.

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