Towards an accurate volume reconstruction in atom probe tomography

Abstract

An alternative concept for the reconstruction of atom probe data is outlined. It is based on the calculation of realistic trajectories of the evaporated ions in a recursive refinement process. To this end, the electrostatic problem is solved on a Delaunay tessellation. To enable the trajectory calculation, the order of reconstruction is inverted with respect to previous reconstruction schemes: the last atom detected is reconstructed first. In this way, the emitter shape, which controls the trajectory, can be defined throughout the duration of the reconstruction. A proof of concept is presented for 3D model tips, containing spherical precipitates or embedded layers of strongly contrasting evaporation thresholds. While the traditional method following Bas et al. generates serious distortions in these cases, a reconstruction with the proposed electrostatically informed approach improves the geometry of layers and particles significantly.