Abstract
This paper presents recent results on the development and control ofa microgripper based on flexure joints, fabricated by LIGA and instrumentedwith semiconductor strain-gauge force sensors. The microgripper is theend-effector of a workstation developed to grasp and manipulate tiny objectssuch as the components of a typical biomedical microdevice.The development of the force control in the microgripper is of fundamentalimportance in order to achieve the dexterity and sensing capabilities requiredto perform assembly tasks for biomedical microdevices.As a step towards the definition of the force control strategy, systemidentification techniques have been used to model the microgripper. Resultsindicate that a proportional integral (PI) controller could be used to assure,at the same time, closed-loop stability of the system, and a bandwidthsuitable for the intended applications. The force control is based onstrain-gauge sensors which have been integrated in the microgripper andexperimentally characterized. Sensor response in the idling condition andduring grasp showed that they can provide useful information for force controlof the microgripper.
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