Abstract
The impact of the presence of alien hydrocarbon film on the electrical contact formation process between Au-to-Au surfaces has been studied for DC MEMS switches with statistical means. Based on the Poisson analysis, it is suggested that the electrical conduction in the alien film follows a typical weakest-link principle. The roles of electrical field and contamination film thickness are studied under a framework of Weibull distribution. The establishment of stable electrical contact is found to be inherent to the dielectric breakdown of the nanometer alien film, and triggered by overlapping of the electric stress induced defects that form a percolation path between the metal electrodes.
Published Version
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