Abstract
Three-dimensional (3D) solid-state batteries are receiving great attentions as on-board power supply systems for small-dimension devices, due to their high power and energy densities. However, the fabrication of 3D solid-state batteries has been a formidable challenge due to the limitation of conventional thin film techniques. Recently, atomic layer deposition (ALD) has emerged as a powerful approach towards 3D solid-state batteries, because of its exclusive advantage of coating uniform, pinhole-free, and conformal functional thin films on high-aspect-ratio substrates. Herein, we review the most recent progress in the utilization of ALD for fabricating 3D solid-state batteries. Specifically, two aspects will be highlighted: the development of glassy solid-state electrolytes (especially LiPON), and the fabrication of 3D solid-state batteries in half-cell and full-cell configurations via ALD approach. Based on this, the perspectives for further research will be discussed.
Highlights
Solid-state thin-film batteries have been considered as promising technologies for powering a wide variety of small-dimension devices, such as microelectronics, medical implants, smart cards, and radio-frequency identification tags, due to their intrinsic safety and great flexibility in device design and integration (Long et al, 2004; Roberts et al, 2011)
Future research should focus on using 3D substrates with higher aspect ratio, and thicker electrode thin films to enhance the areal capacity
The cathode materials developed by ALD so far involved complex surface chemisty, which is unsuitable for 3D battery integration from practical point of view
Summary
Solid-state thin-film batteries have been considered as promising technologies for powering a wide variety of small-dimension devices, such as microelectronics, medical implants, smart cards, and radio-frequency identification tags, due to their intrinsic safety and great flexibility in device design and integration (Long et al, 2004; Roberts et al, 2011). Enormous efforts have been devoted to developing the anode, cathode, and SSE materials by ALD, which are functional components for building 3D solid-state batteries These materials, along with their ALD chemistry and processes have been summarized in several recent review papers (Knoops et al, 2012; Liu and Sun, 2015; Lu et al, 2017). Many anode (such as TiO2, SnO2, Co3O4, and GaS) and cathode (such as V2O5, LiCoO2, LiFePO4, and LiMnO2) materials have been developed by ALD, and demonstrated good electrochemical performance in Li-ion batteries (Liu and Sun, 2015; Lu et al, 2017) These anode and cathode are yet to be integrated into 3D solid-state batteries, and the lack of suitable SSEs by ALD becomes a limiting factor. ALD-LiPON by ALD (LiHMDS or LiOtBu–DEPA) holds great promise for
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