Abstract
Every imaging technique usually suffers more or less from two inaccuracies: nonhomogenous sensitivity of the recording device over the images area and spatial distortion. This work presents a method that corrects both errors by evaluating the changes of the images due to two small sample position shifts. The algorithm calculates a vector field that is used to determine the “undistorted” position of any point of the image and to determine the apparatus-caused inhomogeneities of the imaged intensities leading to an image that is free from both kinds of imaging errors. In this paper, the theoretical basis of the algorithm, the correction of a test image, and two images obtained from laterally resolved secondary ion mass spectrometry experiments are shown.
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