Abstract
Recently, we proposed a ring-shaped surface acoustic wave (SAW) resonator sensitive element design, as well as analyzed its characteristics and suggested its optimization strategy, with major focus on their temperature stability. Here, we focus on further optimization of the design to narrow the bandwidth and improve signal detection, while taking into account typical technological limitations. Additionally, the purpose of design optimization and modeling is to check the preservation of operability in the case of lithography defects, which is the most common technological error. For that, we suggest structural alteration of the interdigital transducer (IDT) that leads to its partial fragmentation. Using COMSOL Multiphysics computer simulations, we validate several IDT options and show explicitly how it could be optimized by changing its pin geometry. Based on the results of the study, prototyping and printing of ring resonators on a substrate using photolithography will be carried out.
Highlights
One of the main components of most modern devices can be called a microelectromechanical system (MEMS), which combines minimal dimensions due to the placement of elements on a single board, low cost due to mass production and low energy consumption at the level of units of watts
surface acoustic wave (SAW) sensors in their design do not have torsions, and the sensitive element is rigidly fixed to the sensor body, which allows it to withstand much higher overloads compared to classical MEMS
When the SAW passes through the interdigital transducer (IDT) structure, an alternating voltage is induced on the electrodes due to the direct piezoelectric effect; that is, the SAW energy is converted back into electrical energy
Summary
One of the main components of most modern devices can be called a microelectromechanical system (MEMS), which combines minimal dimensions due to the placement of elements on a single board, low cost due to mass production and low energy consumption at the level of units of watts. SAW sensors in their design do not have torsions, and the sensitive element is rigidly fixed to the sensor body, which allows it to withstand much higher overloads compared to classical MEMS. The main research in the field of SAW accelerometers and similar sensors is aimed at finding new piezoelectric materials for the console of sensitive elements (SE), which could overcome the typical limitations of existing materials (SiO2, LiNbO3). We proposed a SAW-based MMA design based on a ring-shaped sensitive element [20,21] and considered the optimal mounting of the console in the housing, a material for a promising SE design in accordance with its frequency characteristics, and evaluated the potential effect of external influences, such as excessive acceleration and temperature on SE [22]. The work was carried out using a computer simulation in the COMSOL Multiphysics software package
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