Abstract
Energy-selecting TEM can avoid the chromatic error of large specimen thicknesses when selecting an energy window at the most probable energy loss. The resolution is limited by the spatial beam broadening for structures at the top (electron entrance) of the specimen layer. A test experiment with polystyrene spheres of 1.1 μm in diameter shows a blurring of 8 nm when imaging with Δ E = 250 eV and E = 80 keV.
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