Abstract
All-nanoparticle multilayer films were prepared by layer-by-layer deposition of SiO 2 and Al 2O 3 nanoparticles onto polyester (PE) substrate. The top-most SiO 2 (and Al 2O 3) layer was characterized using ToF-SIMS and SEM. An element-specific homogeneity index obtained by ToF-SIMS measurement provides clue to the formation mechanism. Experimental results from ToF-SIMS and SEM accord well with molecular dynamics simulation results, demonstrating the potential of using ToF-SIMS to study all-nanoparticle multilayer films.
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