Abstract
Nanostructured titanium oxide films synthesized by supersonic cluster beam deposition were analyzed by high-resolution transmission electron microscopy. Nanoparticles were produced in a pulsed microplasma cluster source in the presence of He or helium-oxygen mixture as carrier gas. While films grown using He consist only of rutile and anatase TiO2 nanocrystals formed upon exposure to air, films grown with a He∕O mixture also contain isolated TiOx cages that closely resemble carbon fullerenes. The diameter of the cages ranges from about 0.9to2.7nm. A fraction of the cages have irregular shapes, possibly induced by oxygen vacancies. The TiOx fullerenoids grow in the gas phase, in a narrow temperature/pressure range within the cluster source, and are preserved through low-energy deposition.
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