Abstract
This study investigated microstructure of SnO 2 thin films deposited by ultrasonic spray pyrolysis technique using 0.2 M of SnCl 4·5H 2O in absolute ethanol as a precursor. The deposition temperature (350–450 °C) and time (20–90 min) were varied. The influence of film-deposition conditions on grain size and orientation were discussed. The deposited SnO 2 films were textured polycrystalline films. The preferred orientation of SnO 2 films were quantitatively evaluated by texture coefficient (TC). The mean grain size and film thickness determined by SEM could be controlled over a range of 50–325 nm and 80–2690 nm, respectively.
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