Abstract
Size-selected TiN nanoclusters in the range of 4 to 20 nm have been produced by an ionized cluster beam, which combines a glow-discharge sputtering with an inert gas condensation technique. With this method, by controlling the experimental conditions, it was possible to produce nanoparticles with a high control in size. The size distribution of TiN nanoparticles was determined before deposition by mass spectroscopy and confirmed by atomic force microscopy. The size distribution was also analyzed using a high-resolution transmission electron micrograph. The photoluminescence [PL] spectra of TiN nanoparticles at different sizes were also experimentally investigated. We reported, for the first time, the strong visible luminescence of TiN nanoparticles on Si (111) wafer due to the reduced size. We also discussed the PL intensity as a function of the nanoparticle size distribution.
Highlights
Metal nanoparticles 1 to 100 nm in size and 102 to 108 atom aggregates have demonstrated different physical-chemical properties from their bulk
The size distribution, cover surface, and nearest neighbor distance were statistically analyzed as a function of the bias voltage
Size-selected TiN nanoparticles were produced on Si (111) substrates at room temperature by ICBD method
Summary
Metal nanoparticles 1 to 100 nm in size and 102 to 108 atom aggregates (known as clusters) have demonstrated different physical-chemical properties from their bulk. A statistical detailed analysis of the TiN nanoparticle size distribution as a function of bias voltage is performed by HRTEM. Cluster production and co-deposition A NanoSys 500 deposition system, built by Mantis Deposition Ltd (Thame, Oxon, UK), was used to produce size-selected TiN nanoclusters [19]. Once the size clusters are selected by the MesoQ mass filter, they are accelerated by applying a bias voltage (Vb) to a substrate in a high vacuum with a base pressure of 108 Torr. The nanoparticle size was controlled by regulating the magnetron power, gas flow (Ar and N2), and aggregation zone length These parameters were varied to produce particles of different sizes onto the substrate. All the spectra were corrected for the spectral response of the system
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