Abstract
In this paper, we propose a novel kind of time delay integration (TDI) image sensor based on single photon avalanche diode (SPAD), i.e. TDI-SPAD. Compared with existing TDI imaging devices, the proposed TDI-SPAD sensor is characterized by low noise, high sensitivity, high modulation transfer function (MTF) and transfer efficiency. The proposed architecture design of multi-stages TDI-SPAD sensor and the digital transfer circuits are discussed in detail, and the full function of TDI-imaging is demonstrated with experiments based upon two SPAD sensors. First, the imaging function of TDI-SPAD is verified through imaging of scanning scene with a $128\times128$ SPAD array. Then, we fabricate a $256\times2$ TDI-SPAD sensor, build a TDI-imaging camera system, and demonstrate the feasibility and SNR improvement of the proposed TDI-imaging sensor.
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