Abstract
We report a driving and movement detection system for a micro vibratory gyroscope with double gimbal structure. The gyroscope has two-coils on its outer and inner-gimbals and the inner-gimbal is vibrated by the electromagnetic force. Our system drives inner-coil and simultaneously detects the vibration of the inner-gimbal by time shared control. The system includes a PLL loop with an over-tone oscillator and PLD for achieving time-shared driveing/detection scheme. The system showed good characteristics for angular rate detection.
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