Abstract
Laser-induced fluorescence (LIF) combined with resonant optical absorption spectroscopy (ROAS) were utilized for characterization of the Ar-Ti high-power impulse sputtering (HIPIMS) discharge at working pressures of 5 and 20 mTorr. The LIF measurements were performed during the plasma off-time. It was shown that the time-behavior of the measured densities depends strongly on the working pressure in the reactor as well as on the distance from the magnetron target. ROAS measurements indicates that the absolute ground state level density of Ti can reach ≈ 1011 cm−3 (at 20 mTorr, 10 μs pulse, and 12 kW of applied power per pulse). Generally, the obtained results indicate highly non-uniform spatial and temporal behavior of the sputtered species such as Ti and Ti+, which correlate with the results previously obtained in the other magnetron discharges.
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