Abstract

We reported a low-friction performance of Ti-doped a-C film, which is Ti-inducing sp2 nanocrystallites embedded in a-C structure. Mechanical and tribological tests showed that Ti-inducing sp2 nanocrystallites softened the film hardness from 22.5 to 18.8 GPa and lowered the friction coefficient from 0.15 to 0.05. Friction interface characterization indicated that abundant sp2 nanocrystallites lay down on the contact surfaces. The low-friction was attributed to the interaction between sp2 C layers, which originated from original Ti-inducing and new Ti-promoting sp2 nanocrystallites. The Ti-promoting effect was speculated that Ti atoms with Ti-C bond reacted with O atoms to form TiO bond (TiO2), then some released C atoms turned to sp2 nanocrystallites at the friction interface.

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