Abstract
Ti-doped hydrogenated DLC films were prepared by radio frequency discharged CH 4/Ar plasma and co-sputtering of titanium targets. It was found that, after the incorporation of Ti together with O, the DLC films exhibit superior friction performance, including ultralow and steady friction coefficients (about 0.008) in ambient air, little sensitivity to relative humidity and independence of counterpart material and test atmosphere. A combined effect of the inherent physical properties with the friction-induced structural transformation, and the presence of a transfer film, may explain the excellent lubrication performance of the Ti-DLC films.
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