Abstract
Ti 1− x Al x N, Ti 1− x Zr x N and Ti 1− x Cr x N films were synthesized by changing the contents, x, by using the arc ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti 1− x Al x N films changed from the NaCl into wurtzite type at x=0.6–0.7, while Ti 1− x Cr x N and Ti 1− x Zr x N kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti 1− x Al x N and Ti 1− x Cr x N monotonously decreased from 4.23 Å ( x=0) down to 4.17 Å ( x=0.6) and to 4.16 Å ( x=1.0), respectively. On the other hand, the lattice parameters of Ti 1− x Zr x N films monotonously increased from 4.23 Å ( x=0) up to 4.58 Å ( x=1.0). The maximum micro-hardness of Ti 1− x Al x N, Ti 1− x Zr x N and Ti 1− x Cr x N films were Hv 3200 ( x=0.6), 3000 ( x=0.5) and 3000 ( x=0.2), respectively.
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