Threshold energy for sputtering and its dependence on angle of incidence

Abstract

The sputtering yield at low energies and at various angles of incidence is investigated by computer simulation with the program TRIM.SP and compared to available experimental data. The question of the sputtering threshold energy is discussed in detail, and the processes responsible for sputtering at these low energies are studied. It is shown that for heavy ion sputtering the threshold depends on the angle of incidence. Analytic equations are derived which demonstrate that the inelastic energy loss plays an important role for the threshold energy for heavy projectiles.