Abstract

We perform a comparative study of the threshold voltage (Vth) variation between inversion-mode and junctionless nanowire devices with oblique single grain boundary (o-SGB) in a sub-40 nm poly-silicon (Poly-Si) channel using 3D simulation. The Vth variation due to the o-SGB becomes significant as the devices scale down to 20 nm where the o-SGB can fully affect the whole channel potential. In addition, due to relatively less flat energy band in the channel, the junctionless Poly-Si nanowire devices show larger Vth variation compared with the inversion-mode devices.

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