Three-dimensional nonlocal heating model of planar-type inductively coupled plasma with rectangular geometry

Abstract

Summary form only given, as follows. A three-dimensional heating model of inductively coupled plasma sources with the rectangular geometry is developed. The model includes the anomalous skin effect with an arbitrary value of electron collision frequency and source current. The electromagnetic field is decomposed into Fourier modes, and the mode excitation by the source current is determined based on the uniqueness theorem of wave equation. With the calculated electromagnetic fields, plasma impedance is expressed as a function of various geometric parameters and plasma parameters.