Abstract
A three-dimensional electron heating model is developed for a microwave plasma source with a stub antenna. Electromagnetic flelds are expanded into a Fourier-Bessel series with expansion coe‐cients. The mode excitation method is utilized for obtaining electromagnetic flelds based on a Poynting theorem like relation. Using the obtained analytic electromagnetic flelds, we investigate the characteristics of the electron power absorption. Finally, a tractable form of the plasma resistance is obtained as a function of various plasma and geometrical parameters and applied to carrying out a parametric study. PACS numbers: 52.50.-b, 52.50.Dg
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