Abstract
We describe a three-dimensional (3D) laser-induced fluorescence (LIF) diagnostic for argon ions in a helicon plasma source. With three different laser injection orientations at a single spatial location, LIF measurements are performed to determine the 3D ion temperature and the 3D ion flow vector. The measurement process is then repeated at multiple locations in a cross section of the plasma column to create a two-dimensional (2D) map of the 3D ion flow, the ion temperature, and metastable ion density. Scanning in the 2D plane is accomplished by mounting the injection and collection optics on stepping motor driven stages.
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