Three types of planar structure microspring electro-thermal actuators with insulating beam constraints

Abstract

A new concept of using an electrically insulating beam as a constraint is proposed to construct planar spring-like electro-thermal actuators with large displacements. On the basis of this concept, three types of microspring actuators with multi-chevron structures and constraint beams are introduced. The constraint beams in one type (the spring) of these devices are horizontally positioned to restrict the expansion of the active arms in the x-direction, and to produce a displacement in the y-direction only. In the other two types of actuators (the deflector and the contractor), the constraint beams are positioned parallel to the active arms. When the constraint beams are on the inner side of the active arms, the actuator produces an outward deflection in the y-direction. When they are on the outside of the active arms, the actuator produces an inward contraction. Finite-element analysis was used to model the performances. The simulation shows that the displacements of these microspring actuators are all proportional to the number of the chevron sections in series, thus achieving superior displacements to alternative actuators. The displacement of a spring actuator strongly depends on the beam angle, and decreases with increasing the beam angle, the deflector is insensitive to the beam angle, while the displacement of a contractor actuator increases with the beam angle.