Three-layer antireflection diamond-like carbon films on glass

Abstract

The three-layer diamond-like carbon films grown on the glass from the decomposition of toluene and nitrogen by Plasma Enhanced Chemical Vapor Deposition technique. The optimal parameters of three-layered structures with the minimum reflection in the range of 400–750 nm were theoretically calculated using the generalized transfer-matrix technique. The dependence of the refractive index of grown films on the plasma power and nitrogen concentration in the gas mixture was investigated.