Abstract
A three-dimensional model is presented to investigate helium plasma generated by microwave under atmospheric pressure in this paper, which includes the physical processes of electromagnetic wave propagation, electron and heavy species transport, gas flow, and heat transfer. The model is based on the fluid approximation calculation and local thermodynamic equilibrium assumption. The simulation results demonstrate that the maxima of the electron density and gas temperature are 4.79 × 1017 m−3 and 1667 K, respectively, for the operating conditions with microwave power of 500 W, gas flow rate of 20 l/min, and initial gas temperature of 500 K. The electromagnetic field distribution in the plasma source is obtained by solving Helmholtz equation. Electric field strength of 2.97 × 104 V/m is obtained. There is a broad variation on microwave power, gas flow rate, and initial gas temperature to obtain deeper information about the changes of the electron density and gas temperature.
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