Numerical study on microwave-sustained argon discharge under atmospheric pressure

Abstract

A numerical study on microwave sustained argon discharge under atmospheric pressure is reported in this paper. The purpose of this study is to investigate both the process and effects of the conditions of microwave-excited gas discharge under atmospheric pressure, thereby aiding improvements in the design of the discharge system, setting the appropriate working time, and controlling the operating conditions. A 3D model is presented, which includes the physical processes of electromagnetic wave propagation, electron transport, heavy species transport, gas flow, and heat transfer. The results can be obtained by means of the fluid approximation. The maxima of the electron density and gas temperature are 4.96 × 1018 m−3 and 2514.8 K, respectively, and the gas pressure remains almost unchanged for typical operating conditions with a gas flow rate of 20 l/min, microwave power of 1000 W, and initial temperature of 473 K. In addition, the conditions (microwave power, gas flow rate, and initial temperature) of discharge are varied to obtain deeper information about the electron density and gas temperature. The results of our numerical study are valid and clearly describe both the physical process and effects of the conditions of microwave-excited argon discharge.