Three-dimensional laser direct writing of electrically conducting and isolating microstructures

Abstract

By laser chemical vapor deposition (LCVD) from a mixture of trimethylamine alane and oxygen or N 2O, transparent aluminum oxide rods can be generated with a high linear growth rate of up to 80 μm/s. Using a two-beam setup, a three-dimensional laser direct write method was developed that permits the direct one-step growth of complex free-standing micro-objects with a resolution down to 3 μm. By subsequent laser metallization of structure parts, electrical conduction properties can be changed from isolating to conducting.