Abstract
Ultrasonic three-dimensional (3-D) image sensing in air is successfully demonstrated by combining a novel thermally induced ultrasonic emission from nanocrystalline porous silicon (nc-PS) device with a condenser microphone array. The nc-PS ultrasonic emitter is composed of a patterned heater electrode, an nc-PS layer, and a single-crystalline silicon (c-Si) substrate. In this device, an ideal probe signal can be generated with little reverberation under impulse operation, since the acoustic output shows a flat frequency response in a wide range due to a quick thermo-acoustic conversion at the device surface without any mechanical vibrations. The 3-D object is detected with a spatial resolution considerably higher than that in the case of conventional techniques based on piezoelectric transducers. It is also shown that the device is available for the detection of several objects with different acoustic reflectance coefficients.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.