Three-Dimensional Active Control for Lightweight Isolation Table Taken Account of Addition Structural Vibration

Abstract

This paper presents an active isolation system with a lightweight table and multi modes of vibration. Then the lightweight isolation table becomes more flexible, elastic multiple modes is appeared within an operation frequency. Therefore, a control system should be designed on taking into account multiple modes. In this paper, the reduced order physical model proposed by Seto is used to design a controller for an active isolation system with the lightweight table and multi modes of vibration. For designing the control system, LQ control theory and double-active control method with feed-forword control are applied. The effectiveness of the control system is demonstrated through simulation and experiment. Moreover, the robust control effect of the system with LQ control theory is verified through simulation when an addition structure is installed on lightweight isolation table.