Active Isolation and Multi-Mode Vibration Controls for Flexible Active Isolation System.

Abstract

This paper proposes a new vibration isolation control method for flexible table with multiple modes to be controlled. In the lightweight isolation table, elastic modes appear on the table in lower frequency range. In order to avoid the elastic vibration of the table, it is necessary to control the vibration in addition to isolation. In this study, a reduced-order model expressed by 5 DOF systems for controlling the models is applied. For designing the controller, LQ control theory and double-active control method with feed forward control are used. Effectiveness of vibration isolation and control of the flexible table is verified through numerical simulations and experimental results.