Threading dislocations in GaAs epitaxial layers on various thickness Ge buffers on 300 mm Si substrates

Abstract

We have grown GaAs epitaxial layers on Ge buffers, themselves on Si (001) substrates, using an Applied Materials 300mm metal organic chemical vapor deposition tool. We varied the Ge buffer thickness between 0.36 and 1.38µm and studied the properties of a 0.27µm thick GaAs layer on top. We found that increasing the Ge buffer thickness yielded smoother GaAs films with an rms surface roughness as low as 0.5nm obtained on a 5×5µm2 area. The bow of the substrate increased following a linear law with the epitaxial stack thickness up to 240µm for a 1.65µm stack. We have also characterized the threading dislocations present in the GaAs layers using X-ray diffraction and cathodoluminescence. Increasing the Ge buffer thickness resulted in lower threading dislocation densities, enabling us to obtain anti-phase boundary – free GaAs films with a threading dislocation density as low as 3×107cm−2. In addition, atomic force microscopy surface topology measurements showed the presence of pits in the GaAs layers whose density agreed well with other threading dislocation density assessments. It thus seems that threading dislocations can in certain cases induce some growth rate variations, making them visible in as-grown GaAs films. Using thicker Ge buffers results in smoother films with less threading dislocations, with the side effect of increasing the bow on the wafer. If bow is not an issue, this is a practical approach to improve the GaAs (on Ge buffer) on silicon quality.