Abstract
The importance of the thermocouple gauge in vacuum technology is well established. In this paper we present the fabrication and the calibration of a miniature thermocouple gauge using Cu–Cr thin films. The thermocouple gauge consists of a thin-film Cr heater and a thin-film Cu–Cr differential thermocouple on a glass substrate. The thin-film Cu–Cr thermocouple was calibrated using a standard K-type thermocouple. At constant temperature the change in the input power is a monotonic function of the change in the pressure. The measurement was repeated for several gases at a constant heater temperature of 100 °C. Experimental results show that our device can be used for a wide range of measurements. Owing to its small size, fabrication simplicity, and compatability with the existing thin-film processing it is rather easy to incorporate our device with other integrated circuits.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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