Abstract
Abstract We use a differentially pumped e-beam evaporator and oxygen plasma to grow films of YBaCuO at 540C on bare silicon and sapphire which are completely superconducting by 73K. The best films are grown on SrTiO 3 (110) at 570C and have zero resistance by 84K. Other orientations and substrates yield lower Tc. All the processing is done in-situ, with temperatures never exceeding the deposition temperature.
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