Abstract
Thin films are playing a more and more important role for technological applications and there are many aspects of materials surface processing and thin film production, ranging from simple heat treatments to ion implantation or laser surface treatments. These methods are often very complicated, involving many basic processes and they have to be optimized for the desired application. Nuclear methods, especially Mossbauer spectroscopy, can be successfully applied for this task and some examples will be presented for laser-beam and ion-beam based processes.
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